Cobalt Bumping Tungsten?
There’s a problem with transistor gates at 5-nm and below. There’s simply not enough room for all the things in the metal stack used for contacting the gate.
Let’s break that down, at least from the viewpoint of Applied Materials as described to me (and presented) at last fall’s IEDM show. In a simpler world, you’d have a gate metal, and it would touch the gate, and that would be that. But noooooo… that would be too easy. Let’s work our way through the stack.
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