Triple Patterning Explosion
The type of patterning to be used at a given technology node is determined layer-by-layer. At 10 nm, SADP is planned for metals, but contacts are looking like they’ll require triple patterning, according to Mentor’s David Abercrombie.
We’ve talked about LELE coloring before, and algorithms exist to automatically color a circuit with linear scaling – twice as big a circuit takes twice as long to … Read More → "Triple Patterning Explosion"