KLA-Tencor’s New Reticle Inspector
Seems like no aspect of IC design and production escapes the need for All Things to Get Harder and Harder, requiring ever-better solutions. Today we look at reticle inspection, and, in particular, at KLA-Tencor efforts to adapt their Teron system, originally intended for mask shop use, to the needs of production fabs. The idea is that, when new reticles come into the fab, they need to be inspected as a basic QC step. And, after 300-600 or so uses, they need to be re-qualified to make sure that acquired defects aren’t reducing die yield.