EV Group Introduces Full-field UV Nanoimprint Lithography System For Photonics, LED And BioMEMS Production
ST. FLORIAN, Austria, Dec. 3, 2013 /PRNewswire/ — EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today introduced the EVG®720 automated UV nanoimprint lithography (UV-NIL) system. … Read More → "EV Group Introduces Full-field UV Nanoimprint Lithography System For Photonics, LED And BioMEMS Production"