editor's blog
Subscribe Now

EUV Movement Towards HVM

When last we talked with Cymer, they had just announced their PrePulse technology that gets more of the energy out of the droplets they blast with a laser. They had achieved 50-W output.

That’s only half-way to what’s needed for production, and, at the time, it was an “open-loop” result. That is, not something that could be repeated over and over in a production setting.

In my discussion with them at Semicon West, they now have 50 W working on a sustained, closed-loop basis (for five hours). And they have achieved 90 W in short open-loop bursts.

But there are lots of other characteristics besides simple power that are important for production viability.

  • Duty cycle: after they run the system for a while, things heat up. Literally. For that and a number of reasons, they have to give the machine a break or else the power rolls off. Right now they’re running at 40% duty cycle; they’re working to get that (closer) to 100%.
  • Dose stability: their five-hour runs have resulted in 90% of dice having less than 1% dose error.
  • Availability: if the machine is always down or needs lots of maintenance, well, that’s a problem. They’re now claiming 70% up-time.
  • Collector longevity: at some point, having been bombarded with pulses, the collector will start to lose reflectivity. It would then need to be replaced – meaning downtime and cost. So far they say that they’ve gone above 30 billion pulses without seeing any reflectivity degradation.

Meanwhile, efforts to increase power depend on three separate factors: input power, “conversion” efficiency – how much of that input power gets released from a pulsed droplet, and collector efficiency.

Their PrePulse technology has satisfied them on the second item; their efforts at this point are in increasing the input power (they’ve demonstrated up to 17 kW) and improving collector efficiency. This takes place in what they call their “HVM II” model, which is being integrated now.

Leave a Reply

featured blogs
Apr 22, 2021
President George H. W. Bush famously said that he didn't do "the vision thing". Well, here at Cadence we definitely do the vision thing. In fact, the Tensilica Vision DSP product line... [[ Click on the title to access the full blog on the Cadence Community si...
Apr 21, 2021
Robotics are everywhere, or so it seems. Robot combat, STEM outreach, robotic arms and advanced surgical devices are but a few applications that touch our everyday life. As a student, I was the President of the Santa Barbara City College Robotics Club and a FIRST Robotics com...
Apr 21, 2021
Introducing PrimeLib, an SoC design tool that maps the latest chip technologies & enables correct-by-construction design for SoCs at advanced process nodes. The post Advanced Nodes Drive Demand for Advanced Library Characterization and Validation Solutions appeared firs...
Apr 20, 2021
By Sherif Hany and Abdellah Bakhali Regardless of which technology node they're using, design houses… The post Give me my space! Why high voltage and multiple power domain designs need automated context-aware spacing checks appeared first on Design with Calibre....

featured video

The Verification World We Know is About to be Revolutionized

Sponsored by Cadence Design Systems

Designs and software are growing in complexity. With verification, you need the right tool at the right time. Cadence® Palladium® Z2 emulation and Protium™ X2 prototyping dynamic duo address challenges of advanced applications from mobile to consumer and hyperscale computing. With a seamlessly integrated flow, unified debug, common interfaces, and testbench content across the systems, the dynamic duo offers rapid design migration and testing from emulation to prototyping. See them in action.

Click here for more information

featured paper

Understanding Functional Safety FIT Base Failure Rate Estimates per IEC 62380 and SN 29500

Sponsored by Texas Instruments

Functional safety standards such as IEC 61508 and ISO 26262 require semiconductor device manufacturers to address both systematic and random hardware failures. Base failure rates (BFR) quantify the intrinsic reliability of the semiconductor component while operating under normal environmental conditions. Download our white paper which focuses on two widely accepted techniques to estimate the BFR for semiconductor components; estimates per IEC Technical Report 62380 and SN 29500 respectively.

Click here to download the whitepaper

Featured Chalk Talk

General Port Protection

Sponsored by Mouser Electronics and Littelfuse

In today’s complex designs, port protection can be a challenge. High-speed data, low-speed data, and power ports need protection from ESD, power faults, and more. In this episode of Chalk Talk, Amelia Dalton chats with Todd Phillips from Littelfuse about port protection for your next system design.

Click here for more information about port protection from Littelfuse.