editor's blog
Subscribe Now

MEMS Measurement Standards

Consistent with a move towards standards in MEMS, NIST has released two reference chips that fabs can use to cross-check their measurement techniques. There are several critical parameters unique to MEMS, and five of them are captured by this 5-in-1 reference. NIST has done its own measurements, and the idea is to replicate the results they got. The chips are available for sale ($1735), along with the results for comparison.

The five tests covered are:

  • Young’s modulus
  • Residual strain
  • Strain gradient
  • Step height
  • In-plane length

There are two versions of the chip: one (RM 8096) uses a CMOS process with bulk micromachining, meaning that the structures are etched out of the bulk silicon. The other (RM 8097) uses surface micromachining to build the structures out of poly.

Each chip has additional test structures for things like tensile strength and line widths.

You can find more information on their summary page, and much more detail in their PDF proposals (bulk micro-machined here; surface micro-machined here).

Leave a Reply

featured blogs
Jun 20, 2018
In this week'€™s Whiteboard Wednesday, Marc Greenberg, walks us through a typical ADAS system architecture and then provides a real-life testimonial on the value of these systems. https://youtu.be/EQL4jeD25_g...
Jun 19, 2018
Blockchain. Cryptocurrencies. Bitcoin mining. Algorithmic trading. These disruptive technologies depend on high-performance computing platforms for reliable execution. The financial services industry invests billions in hardware to support the near real-time services consumer...
Jun 7, 2018
If integrating an embedded FPGA (eFPGA) into your ASIC or SoC design strikes you as odd, it shouldn'€™t. ICs have been absorbing almost every component on a circuit board for decades, starting with transistors, resistors, and capacitors '€” then progressing to gates, ALUs...
May 24, 2018
Amazon has apparently had an Echo hiccup of the sort that would give customers bad dreams. It sent a random conversation to a random contact. A couple had installed numerous Alexa-enabled devices in the home. At some point, they had a conversation '€“ as couples are wont to...
Apr 27, 2018
A sound constraint management design process helps to foster a correct-by-design approach, reduces time-to-market, and ultimately optimizes the design process'€”eliminating the undefined, error-prone methods of the past. Here are five questions to ask......