Imec and SPTS Technologies, an Orbotech Company, Collaborate on Critical Processes for 3D IC Wafer Stacking
SAN FRANCISCO – July 14, 2015 – Nano-electronics research center imec and SPTS Technologies, an Orbotech company (NASDAQ: ORBK) and supplier of advanced wafer processing solutions for the global semiconductor and related industries, announced today at SEMICON West that they are jointly developing a highly accurate, short cycle-time dry silicon removal and low temperature passivation solution for through-silicon via-middle processing and thinning of the top-wafer in wafer-to-wafer bonding.
Wafer backside processing is critical for 3D-IC wafer stacking. Today, through-silicon vias (TSV) formed using ‘via-middle’ processing, are … Read More → "Imec and SPTS Technologies, an Orbotech Company, Collaborate on Critical Processes for 3D IC Wafer Stacking"

