The Ardic Instruments M150 MEMS Analyzer is an award-winning instrument designed to analyze resonance frequencies in MEMS devices from 1Hz to 4.2MHz in 60 seconds. Using a point-and-shoot 3µm laser optical system, the user can quickly obtain resonance peaks of a microstructure through wide bandwidth frequency scanning and real-time Fourier transform. By using non-contact optical measurement, the M150 is a highly effective technique for measuring resonance frequencies without altering the sample properties. The M150 is a critical instrument for MEMS research, development, and quality control.
Most MEMS devices rely on the mechanical resonance of microstructures to achieve the designed application. Sensors often use the change in resonance frequency as the main mechanism for detection. Measuring the resonance frequency at different positions on the MEMS device is an effective method for verifying that the original MEMS design was accurately manufactured. MEMS designers and foundries can use this information to diagnose the mechanical behavior of microstructures for failure analysis or quality control.
Edward Chyau, the company’s founder and CEO states, “Abiding by our company’s design philosophy, the system achieves accurate and repeatable results with minimal setup and training. We spent a lot of time interacting with end-users and understanding what they really need when it comes to MEMS development. We embodied these needs into our design and engineering, resulting in features such as an auto-calibrating optical system, embedded small-field and large-field CCDs, and a built-in excitation source. Our goal was to design an instrument that satisfied most users without the need for expensive add-ons.” The M150 was awarded the 2013 iF product design award for its excellence in user experience and engineering quality.
The M150 has been tested and used in labs around the world, including the US, Germany, China, Singapore, Japan, and Taiwan. The prevailing response is that the system is far easier to use than alternatives in the market.