editor's blog
Subscribe Now

TSVs: Like Vias, Only 1000X Deeper

We recently looked at Applied Materials’ solution to the challenges of lining small vias: using cobalt. But those are through-dielectric vias. What about through-silicon vias (TSVs)? After all, they can be a thousand times deeper than a standard via, so if a standard via is hard to cover, imagine how hard it must be for a TSV.

Of course, we’re talking a wider via, but AMAT says that standard physical vapor deposition (PVD) tools do an inadequate job of coating the TSVs when applying the barrier, for lots of the same reasons we discussed in the cobalt story.

Their solution to the TSV issue isn’t quite as radical as a new metal; it involves tightening up the angle of dispersion for the metals, providing better coverage. With better coverage, the barrier can also be made thinner, saving cost. A thinner layer is faster to deposit, improving throughput (and reducing cost).

Figure.png

 

(Image courtesy Applied Materials)

In addition, they’ve built a production-worthy chamber for use with titanium rather than the more typical “proven” tantalum. Titanium apparently being cheaper than tantalum. Both can be integrated with the copper seed.

You can read more about their Ventura PVD in their announcement.

Leave a Reply

featured blogs
May 19, 2022
The current challenge in custom/mixed-signal design is to have a fast and silicon-accurate methodology. In this blog series, we are exploring the Custom IC Design Flow and Methodology stages. This... ...
May 19, 2022
Learn about the AI chip design breakthroughs and case studies discussed at SNUG Silicon Valley 2022, including autonomous PPA optimization using DSO.ai. The post Key Highlights from SNUG 2022: AI Is Fast Forwarding Chip Design appeared first on From Silicon To Software....
May 12, 2022
By Shelly Stalnaker Every year, the editors of Elektronik in Germany compile a list of the most interesting and innovative… ...
Apr 29, 2022
What do you do if someone starts waving furiously at you, seemingly delighted to see you, but you fear they are being overenthusiastic?...

featured video

Synopsys PPA(V) Voltage Optimization

Sponsored by Synopsys

Performance-per-watt has emerged as one of the highest priorities in design quality, leading to a shift in technology focus and design power optimization methodologies. Variable operating voltage possess high potential in optimizing performance-per-watt results but requires a signoff accurate and efficient methodology to explore. Synopsys Fusion Design Platform™, uniquely built on a singular RTL-to-GDSII data model, delivers a full-flow voltage optimization and closure methodology to achieve the best performance-per-watt results for the most demanding semiconductor segments.

Learn More

featured paper

Introducing new dynamic features for exterior automotive lights with DLP® technology

Sponsored by Texas Instruments

Exterior lighting, primarily used to illuminate ground areas near the vehicle door, can now be transformed into a projection system used for both vehicle communication and unique styling features. A small lighting module that utilizes automotive-grade digital micromirror devices, such as the DLP2021-Q1 or DLP3021-Q1, can display an endless number of patterns in any color imaginable as well as communicate warnings and alerts to drivers and other vehicles.

Click to read more

featured chalk talk

TE's Dynamic Series for Robotics

Sponsored by Mouser Electronics and TE Connectivity

If you are designing a robot, a drive system, or any electromechanical system, the dynamic series of connectors from TE Connectivity might be a great solution for your next design. In this episode of Chalk Talk, Amelia Dalton chats with Jennifer Love from TE Connectivity about the design requirements common in robotic applications and why this new flexible connector with its innovative three point contact design, audible locking system, and dedicated tooling make it a great solution for all kinds of robotic designs.

Click here for more information about TE Connectivity Dynamic D8000 Pluggable Connectors