MEMS Measurement Standards
Consistent with a move towards standards in MEMS, NIST has released two reference chips that fabs can use to cross-check their measurement techniques. There are several critical parameters unique to MEMS, and five of them are captured by this 5-in-1 reference. NIST has done its own measurements, and the idea is to replicate the results they got. The chips are available for sale ($1735), along with the results for comparison.
The five tests covered are:
- Young’s modulus
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