editor's blog
Subscribe Now

Another Transistor Goes Vertical

While the recent MEMS Executive Congress focused on electro-mechanical applications, occasionally MEMS processing techniques were highlighted for strictly electrical purposes, with no mechanical component.

In one example, ICEMOS talked about their collaboration with MEMS manufacturer Omron for a new way of making superjunction power transistors.

Superjunction transistors overcome the Ron/breakdown tradeoff issue using alternating p and n stripes. In theory, these can be arranged a number of different ways, but, according to ICEMOS, the typical way it’s done now is horizontally, by growing a series of epitaxial layers of opposite doping. This, they say, is an expensive way of doing things.

Instead, they’ve gone vertical. The way they do this is by etching trenches using DRIE in Omron’s fab. They then use a sidewall implant – which is almost vertical, but tilted ever so gently – to dope the sides of these trenches.

Even though this uses a process that, to a standard CMOS fab, would be non-standard, they say it’s still cheaper than the multi-epi way of doing things. They also say that they can make smaller devices this way.

You can find out more about what they do from this PDF presentation

Leave a Reply

featured blogs
Nov 15, 2019
As we seek to go faster and faster in our systems, heat grows as does the noise from the cooling fans. It is because of this heat and noise, many companies are investigating or switching to submersible cooling (liquid immersion cooling) options. Over the last few years, subme...
Nov 15, 2019
Electronic design is ever-changing to adapt with demand. The industry is currently shifting to incorporate more rigid-flex circuits as the preferred interconnect technology for items that would otherwise be off-board, or require a smaller form factor. Industries like IoT, wea...
Nov 15, 2019
"Ey up" is a cheery multi-purpose greeting that basically means "Hello" and "Hi there" and "How are you?" and "How's things?" all rolled into one....
Nov 15, 2019
[From the last episode: we looked at how intellectual property helps designers reuse circuits.] Last week we saw that, instead of creating a new CPU, most chip designers will buy a CPU design '€“ like a blueprint of the CPU '€“ and then use that in a chip that they'€™re...
Nov 15, 2019
Last week , I visited the Cadathlon@ICCAD event at the 2019 International Conference on Computer Aided Design . It was my first CADathlon and I was quite intrigued , since the organizers webpage... [[ Click on the title to access the full blog on the Cadence Community site. ...