editor's blog
Subscribe Now

Xtreme Update

We recently looked at a novel approach used by Xtreme to generate enough photons for EUV lithography. Just last week, there was a meeting of EUV folks to update their latest results.  I talked with Olivier Semprez about what Xtreme reported.

The goal here is to provide enough power to process 60 wafers/hr. That comes to 100 W with at least a 60% duty cycle.

The duty cycle issue comes from the logistics of exposing wafers. The scanner will scan across a wafer while exposing, and then will need to move to a new row, or perhaps a new wafer. The photons can be “blanked” during those transitions (and probably should be – any power used during that time is wasted). So the duty cycle refers to the amount of time that the source is on vs. blanked, and the goal is that the source be able to sustain a 60% duty cycle.

It turns out that, while LPP has some specific issues that require giving the source a break every now and then, the LDP setup can run continuously for hours if needed. So duty cycle isn’t an issue.

Specifically, they achieved 30 W at 100% duty cycle. They also got to 37% with a 50% duty cycle. Whoa! Wait, I thought we just said duty cycle doesn’t matter for them? Well, it doesn’t as far as photon generation goes. Apparently, it does matter as far as measuring them goes – they have to give the sensors a break so they don’t burn them out.

They’ve also found that the stability of the delivered dose is within specifications.

Meanwhile, they’re planning a demonstration of 50 W by the end of the year.

Of course, an obvious question is, how are they going to get from 30 to 100 W? There are three elements to that:

  • Faster laser pulsing (which also means running the wheels faster to replenish the tin more quickly)
  • A higher power supply
  • Better cooling, although apparently the current cooling setup should be sufficient to get to 100 W; at some point, if they want to exceed that, they’ll need to make some changes.

Of course, they’ll also need to figure out how to measure this…

Leave a Reply

featured blogs
Mar 8, 2021
Ever seen Despicable Me? It'€™s got some great quotes.(1) My favorite is Agnes'€™s line when she sees the giant stuffed unicorn:  '€œIt'€™s so fluffy I'€™m going to die!'€ How does this possibly, in any way remotely relate to connectors? Just when I thought we ...
Mar 8, 2021
A Silicon Valley institution has shut down. Fry's electronics says on their website: After nearly 36 years in business as the one-stop-shop and online resource for high-tech professionals across... [[ Click on the title to access the full blog on the Cadence Community s...
Mar 7, 2021
Join us as we celebrate Women in STEM as part of International Women's Day 2021, and see how diveristy, inclusion & equity form the heart of the Synopsys team. The post Celebrating International Women'€™s Day at Synopsys…Hands Up! appeared first on From Silicon ...
Mar 5, 2021
The combination of the figure and the moving sky in this diorama -- accompanied by the music -- is really rather tasty. Our cats and I could watch this for hours....

featured paper

The Basics of Using the DS28S60

Sponsored by Maxim Integrated

This app note details how to use the DS28S60 cryptographic processor with the ChipDNA™. It describes the required set up of the DS28S60 and a step-by-step approach to use the asymmetric key exchange to securely generate a shared symmetric key between a host and a client. Next, it provides a walk through on how to use the symmetric key to exchange encrypted data between a Host and a Client. Finally, it gives an example of a bidirectional authentication process with the DS28S60 using an ECDSA.

Click here to download the whitepaper

featured chalk talk

Minitek Microspace

Sponsored by Mouser Electronics and Amphenol ICC

With the incredible pace of automotive innovation these days, it’s important to choose the right connectors for the job. With everything from high-speed data to lighting, connectors have a huge impact on reliability, cost, and design. In this episode of Chalk Talk, Amelia Dalton chats with Glenn Heath from Amphenol ICC about the Minitek MicroSpace line of automotive- and industrial-grade connectors.

Click here for more information about Amphenol FCI Minitek MicroSpace™ Connector System