editor's blog
Subscribe Now

Xtreme Update

We recently looked at a novel approach used by Xtreme to generate enough photons for EUV lithography. Just last week, there was a meeting of EUV folks to update their latest results.  I talked with Olivier Semprez about what Xtreme reported.

The goal here is to provide enough power to process 60 wafers/hr. That comes to 100 W with at least a 60% duty cycle.

The duty cycle issue comes from the logistics of exposing wafers. The scanner will scan across a wafer while exposing, and then will need to move to a new row, or perhaps a new wafer. The photons can be “blanked” during those transitions (and probably should be – any power used during that time is wasted). So the duty cycle refers to the amount of time that the source is on vs. blanked, and the goal is that the source be able to sustain a 60% duty cycle.

It turns out that, while LPP has some specific issues that require giving the source a break every now and then, the LDP setup can run continuously for hours if needed. So duty cycle isn’t an issue.

Specifically, they achieved 30 W at 100% duty cycle. They also got to 37% with a 50% duty cycle. Whoa! Wait, I thought we just said duty cycle doesn’t matter for them? Well, it doesn’t as far as photon generation goes. Apparently, it does matter as far as measuring them goes – they have to give the sensors a break so they don’t burn them out.

They’ve also found that the stability of the delivered dose is within specifications.

Meanwhile, they’re planning a demonstration of 50 W by the end of the year.

Of course, an obvious question is, how are they going to get from 30 to 100 W? There are three elements to that:

  • Faster laser pulsing (which also means running the wheels faster to replenish the tin more quickly)
  • A higher power supply
  • Better cooling, although apparently the current cooling setup should be sufficient to get to 100 W; at some point, if they want to exceed that, they’ll need to make some changes.

Of course, they’ll also need to figure out how to measure this…

Leave a Reply

featured blogs
Sep 20, 2021
As it seems to be becoming a (bad) habit, This Week in CFD is presented here as Last Week in CFD. But that doesn't make the news any less relevant. Great article on wind tunnels because they go... [[ Click on the title to access the full blog on the Cadence Community si...
Sep 18, 2021
Projects with a steampunk look-and-feel incorporate retro-futuristic technology and aesthetics inspired by 19th-century industrial steam-powered machinery....
Sep 15, 2021
Learn how chiplets form the basis of multi-die HPC processor architectures, fueling modern HPC applications and scaling performance & power beyond Moore's Law. The post What's Driving the Demand for Chiplets? appeared first on From Silicon To Software....
Aug 5, 2021
Megh Computing's Video Analytics Solution (VAS) portfolio implements a flexible and scalable video analytics pipeline consisting of the following elements: Video Ingestion Video Transformation Object Detection and Inference Video Analytics Visualization   Because Megh's ...

featured video

Gesture Detection for Automotive In-Cabin Applications

Sponsored by Texas Instruments

See how using 60GHz radar for automotive in-cabin gesture is ideal due to its small size and ability to sense through various materials. Applications using gesture control include changing radio stations, answering phone calls, opening windows, and more.

Click to learn more about gesture detection using 60GHz mmWave radar sensors

featured paper

Detect. Sense. Control: Simplify building automation designs with MSP430™ MCU-based solutions

Sponsored by Texas Instruments

Building automation systems are critical not only to security, but worker comfort. Whether you need to detect, sense or control applications within your environment, the right MCU can make it easy. Using MSP430 MCUS with integrated analog, you can easily develop common building automation applications including motion detectors, touch keypads and e-locks, as well as video security cameras. Read more to see how you can enhance your building automation design.

Click to read more

featured chalk talk

ROHM's KX132-1211 & KX134-1211 Accelerometers

Sponsored by Mouser Electronics and ROHM Semiconductor

Machine health monitoring is a key benefit in the Industry 4.0 revolution. Integrating data from sensors for vibration detection, motion detection, angle measurement and more can give a remarkably accurate picture of machine health, and timely warning of impending failure. In this episode of Chalk Talk, Amelia Dalton chats with Alex Chernyakov of ROHM Semiconductor about the key considerations in machine health monitoring, and how a new line of accelerometers for industrial applications can help.

Click here for more information about Kionix / ROHM Semiconductor KX134 & KX132 Tri-axis Digital Accelerometers