editor's blog
Subscribe Now

Other EBL Guys

While complementary e-beam lithography (CEBL) provides a new twist on how EBL can be worked into high-volume manufacturing, there are a couple other companies actively pursuing EBL technology.

KLA-Tencor has a technology they refer to as REBL: reflective electron beam lithography. Funded as a DARPA project, it amasses a whopping 106 beams. Interestingly, the payoff is throughput that’s 100x faster than what a single-beam can do, giving a decidedly sub-linear throughput boost. They’re seeing up to 10 wafers/hour for via and contact layers, and 2 wafers/hour for metal.

Meanwhile, a small company in Delft, Mapper, is working on a 13,000-beam machine that can do 10 wafers/hour per unit, clusterable in tens for 100 wafers/hour.

More information at the Mapper site. There appears to be no info on REBL on KLA-Tencor’s actual site, but you can find various bits by searching “REBL KLA.”

Leave a Reply

featured blogs
Jun 16, 2019
https://youtu.be/CaIc3qOakxs Made at building 9 elevator (camera Sean) Monday: Cadence Cloud Passport Partner Program Tuesday: Making Trouble in Las Vegas Wednesday: Paris Air Show Thursday: Ericsson... [[ Click on the title to access the full blog on the Cadence Community s...
Jun 14, 2019
The PCI-SIG Developers Conference is a free event for the 800+ member companies that develop and bring to market new products utilizing PCI Express® technology. Granted most people reading this blog won’t be at the conference, but you might be interested...
Jun 14, 2019
By Flint Yoder – Mentor, A Siemens Business Tight schedules? Worried about product reliability? Now you can find and eliminate latch-up sensitivity during schematic design, and avoid those post-layout nightmares. Latch-up'€¦the bane of circuit designers and circuit ve...
Jan 25, 2019
Let'€™s face it: We'€™re addicted to SRAM. It'€™s big, it'€™s power-hungry, but it'€™s fast. And no matter how much we complain about it, we still use it. Because we don'€™t have anything better in the mainstream yet. We'€™ve looked at attempts to improve conven...