industry news
Subscribe Now

Brewer Science’s New OptiLign™ DSA Product Family Provides a Cost-Effective Alternative for Advanced-Node Wafer Patterning

Rolla, Missouri – Feb. 27, 2018 – Brewer Science, Inc., today from SPIE Advanced Lithography 2018 introduced its OptiLign™ commercial-quality directed self-assembly (DSA) material set developed in collaboration with Arkema. The OptiLign system currently includes three materials required for self-assembly: block copolymers, neutral layers and guiding layers. Developed together for optimal performance, these DSA materials are manufactured on Brewer Science’s commercial manufacturing equipment and provide a cost-effective path to advanced-node wafer patterning processes for feature sizes down to 12 nm.

Although Moore’s law is slowing, many foundries and integrated device manufacturers are continuing efforts to scale to finer nodes. As feature sizes shrink more aggressively with each node, the limits of manufacturing equipment are being stretched, and it has become cost-prohibitive to create them using existing patterning processes like self-aligned double patterning and self-aligned quadruple patterning. While the industry is close to the commercialization of extreme ultraviolet (EUV) lithography, the tool cost will limit its use. DSA offers an alternative to existing processes and can be performed on existing, installed fab tool sets. Additionally, DSA will serve as a complement to EUV when it becomes fully available.

“Taking OptiLign materials from pilot line to commercial-scale production represents the next significant milestone in making DSA a viable option for semiconductor manufacturing,” said

Dr. Srikanth (Sri) Kommu, executive director, Semiconductor Business, Brewer Science Inc. “Historically, the industry has relied on equipment enhancements to reach the next technology node. Now, materials solutions are stepping in to provide that edge and extend tool capabilities. The OptiLign product family is an example of this paradigm shift.”

Brewer Science’s OptiLign™ family of DSA products provides all the materials needed for self-assembly. Block copolymers define the pattern. Neutral layers allow the pattern to be formed on each layer. Lastly, guiding layers tell the material which way and how to orient. All the materials are designed to work together for optimal performance, and are dependent on material and surface energy. Additionally, through its partnership with Arkema, Brewer Science has tapped into a way to deliver DSA materials that allows for consistent feature sizes via a unique polymer production process. This process allows for the large scale needed to support an entire technology node, as well as a unique polymer quality and reproducibility, all of which sets OptiLign materials apart from the competition.

“Feature size is built into the molecular structure of the DSA materials and can vary from batch to batch, so securing a sub-nanometric reproducibility can be challenging,” explained Dr. Ian Cayrefourcq, Director of Emerging Technologies, Arkema. “Arkema’s special process for formulating large batches of polymers of the same size allows Brewer Science to supply a fab with consistent feature sizes for the technology node’s life span.”

To learn more about OptiLign materials, visit Brewer Science’s booth #110 at SPIE Advanced Lithography 2018, February 25 – March 1, 2018 in San Jose, California.

About Brewer Science

Brewer Science is a global technology leader in developing and manufacturing innovative materials and processes for the reliable fabrication of cutting-edge microdevices used in electronics such as tablet computers, smartphones, digital cameras, televisions, LED lighting and flexible technology products. In 1981, Brewer Science revolutionized lithography processes with its invention of ARC® materials. Today, Brewer Science continues to expand its technology portfolio to include products enabling advanced lithography, thin wafer handling, 3D integration, and chemical and mechanical device protection and products based on nanotechnology. With its headquarters in Rolla, Missouri, Brewer Science supports customers throughout the world with a service and distribution network in North America, Europe and Asia. We invite you to learn more about Brewer Science at www.brewerscience.com, follow us on Twitter at @BrewerScience, like us on Facebook and subscribe to our blog.

One thought on “Brewer Science’s New OptiLign™ DSA Product Family Provides a Cost-Effective Alternative for Advanced-Node Wafer Patterning”

Leave a Reply

featured blogs
Jul 12, 2024
I'm having olfactory flashbacks to the strangely satisfying scents found in machine shops. I love the smell of hot oil in the morning....

featured video

Larsen & Toubro Builds Data Centers with Effective Cooling Using Cadence Reality DC Design

Sponsored by Cadence Design Systems

Larsen & Toubro built the world’s largest FIFA stadium in Qatar, the world’s tallest statue, and one of the world’s most sophisticated cricket stadiums. Their latest business venture? Designing data centers. Since IT equipment in data centers generates a lot of heat, it’s important to have an efficient and effective cooling system. Learn why, Larsen & Toubro use Cadence Reality DC Design Software for simulation and analysis of the cooling system.

Click here for more information about Cadence Multiphysics System Analysis

featured paper

Navigating design challenges: block/chip design-stage verification

Sponsored by Siemens Digital Industries Software

Explore the future of IC design with the Calibre Shift left initiative. In this paper, author David Abercrombie reveals how Siemens is changing the game for block/chip design-stage verification by moving Calibre verification and reliability analysis solutions further left in the design flow, including directly inside your P&R tool cockpit. Discover how you can reduce traditional long-loop verification iterations, saving time, improving accuracy, and dramatically boosting productivity.

Click here to read more

featured chalk talk

Exploring the Potential of 5G in Both Public and Private Networks – Advantech and Mouser
Sponsored by Mouser Electronics and Advantech
In this episode of Chalk Talk, Amelia Dalton and Andrew Chen from Advantech investigate how we can revolutionize connectivity with 5G in public and private networks. They explore the role that 5G plays in autonomous vehicles, smart traffic systems, and public safety infrastructure and the solutions that Advantech offers in this arena.
Apr 1, 2024
13,698 views