SAN DIEGO, Nov. 28, 2011 /PRNewswire/ — Cymer, Inc. (Nasdaq: CYMI), the world’s leading supplier of light sources used by chipmakers to pattern advanced semiconductor chips, today announced its third-generation Gas Lifetime eXtension (iGLX™) control system for Argon Fluoride (ArF) immersion light sources. An exclusive offering for chipmakers with OnPulse®, the value-added feature is an improvement over previous generations of gas management systems, and is designed to double gas lifetime and automate gas optimization to eliminate manual intervention between service events.
At high-utilization sites, iGLX can provide up to an additional nine to 16 hours productivity per light source each year. As an additional benefit, iGLX also reduces the consumption of fluorine gas by up to 20 percent, while maintaining existing light source performance and enhancing environmentally-friendly manufacturing.
“Chipmakers continue to demand increased tool availability and iGLX offers higher uptime and enables increased wafer output,” said Ed Brown, president and chief operating officer of Cymer. “iGLX is another example of Cymer’s ongoing commitment to continuous improvement and bringing increased value to chipmaker customers through our widely-adopted OnPulse offerings.”
iGLX is currently available to OnPulse customers on ArF immersion light sources as a field upgrade.
About Cymer
Cymer, Inc. (Nasdaq: CYMI) is the market leader in developing light sources, used by chipmakers worldwide to pattern advanced semiconductor chips, and is pioneering a new silicon crystallization tool for the display industry. Cymer’s light sources have been widely adopted by the world’s top chipmakers and the company’s installed base comprises approximately 3,750 systems. Continuing its legacy of leadership, Cymer is currently pioneering the industry’s transition to EUV lithography, the next viable step on the technology roadmap for the creation of smaller, faster chips. The company is headquartered in San Diego and supports its customers from numerous offices around the globe. Cymer maintains a Web site to which it regularly posts press releases, SEC filings, and additional information about Cymer. Interested persons can also subscribe to automated e-mail alerts or RSS feeds. Please visit www.cymer.com.
