editor's blog
Subscribe Now

MEMS over Copper

You may recall that there are various ways to approach CMOS-compatible MEMS. The one that yields the smallest die area is the CMOS-first process, where the CMOS circuits are built and then the MEMS layers are added afterwards. Done properly, it means the MEMS portions can be built right on top of the circuitry – this is, of course, what provides the space savings.

Imec has been doing a lot of work in this space, and in our earlier article, we pointed to their preference for poly-SiGe as a material for proof masses and such. But they had only tried building structures over older aluminum metallization layers.

More aggressive processes use copper metal, and so imec did a demonstration project to prove this out. Specifically, they built a piezoresistive pressure sensor over its readout circuitry, which used copper interconnect.

Bottom line: it worked. This presumably demonstrates that CMOS-first MEMS can smoothly transition over the aluminum-to-copper change at advanced nodes.

More detail in their release

Leave a Reply

featured blogs
Dec 16, 2018
https://youtu.be/izP9iUskcXQ Made at the Cadence Marketing Holiday Party (camera Sean) Monday: RISC-V: Real Products in Volume Tuesday: IEDM: All About Interconnect Wednesday: The Conway... [[ Click on the title to access the full blog on the Cadence Community site. ]]...
Dec 13, 2018
In November, we continued our mobile updates to the website, released a couple of new content experiences, and made placing sample requests even easier. Read more below on these and the rest of the major updates to Samtec.com for November 2018. Continued Improvements to our M...
Dec 12, 2018
The possibilities for IoT devices, much like the internet itself, are endless. But with all of those possibilities comes risks....
Nov 14, 2018
  People of a certain age, who mindfully lived through the early microcomputer revolution during the first half of the 1970s, know about Bill Godbout. He was that guy who sent out crudely photocopied parts catalogs for all kinds of electronic components, sold from a Quon...