Imec produces high-quality EUV sensors for ASML’s next-generation lithography tools
Leuven, Belgium – October 11, 2011 – Imec announces that it has successfully qualified a chipset consisting of custom high-quality EUV sensor dies. These are now being integrated in ASML’s NXE:3100 EUV lithography tools in the field, improving the tools’ overlay and critical dimension (CD) tool performance. With this milestone achievement, imec confirms that its CMORE business line is ready to provide its partners with custom specialty chip solutions.
The sensors were processed according to ASML’s custom designs and specifications, with focus on superior lifetime and sensitivity to direct and high EUV … Read More → "Imec produces high-quality EUV sensors for ASML’s next-generation lithography tools"