KLA-Tencor Announces Novel Defect Discovery and Monitoring Technology
MILPITAS, Calif., April 23, 2013—Today KLA-Tencor Corporation (NASDAQ: KLAC) announced NanoPointTM, a new family of patented technologies for its 2900 Series defect inspection system. NanoPoint represents an entirely new way to discover and monitor defects, at optical speed and on existing optical defect inspection equipment. NanoPoint’s value has already been demonstrated on early metal layers, where line-edge roughness (LER) on dense pattern had previously limited the ability to detect tiny yield-killing defects inline at advanced nodes.
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