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Synopsys’ OSG Group Helps Designers Put Photons in the Right Place
Way back in the 80s, I remember talking to someone about the delicacy of putting together the lens stack used to project the light that exposes circuit patterns onto silicon wafers. Those machines must seem hopelessly primitive today (pellicles were just being introduced), and yet, even then, the optics were a delicate matter.
As described to me, the lenses were carefully ground and assembled with thin sheets of paper between them – like the wax paper that keeps slices of deli cheese from sticking together. To assemble, you carefully positioned one lens over its adjoining one, and, when alignment was perfect, you gently slid the paper out. If you got it wrong, there was no return once the paper was removed: the lenses were so precisely ground that the cohesive attraction between the two lenses would make any further minute adjustments impossible. Read More
March 29, 2012
March 28, 2012
March 26, 2012