SAN FRANCISCO, United States, 10 July 2017 – ASML Holding NV (ASML) today announced lithography, metrology and software innovations at SEMICON West. ASML’s Holistic Lithography integrates a set of products that enables chip makers to develop, optimize and control the production process at the 7/5 nanometer (nm) logic and 16 nm DRAM nodes.
With process nodes continuing to shrink, ASML’s TWINSCAN NXE:3400B EUV lithography system offers the resolution that chip makers need for the most critical layers of a chip, while the new TWINSCAN NXT:2000i DUV immersion system features several hardware innovations, such as redesigned leveling and alignment sensors. This enables DUV/EUV cross-matching on-product overlay of 2.5 nm that addresses a mix-and-match production environment for the most advanced nodes. The lithography systems are complemented by ASML’s new YieldStar 375F metrology system, featuring new optics technology that generates more accurate metrology data faster to support our patterning control loop. Additionally, Hermes Microvision (HMI), which was acquired by ASML last year, expects to ship the new HMI eP5 e-beam metrology system later this year. This system features higher resolution and larger field of view electron optics technology that supports OPC model calibration and pattern fidelity metrology.
“While each product brings independent value to the chip manufacturing process, their true strength lies with working together as part of a well-integrated patterning ecosystem,” said Martin van den Brink, ASML President and Chief Technology Officer. “Our Holistic Lithography products generate fast, accurate and continuous data that chip makers use to drive improved overlay and imaging performance, ultimately enabling the production of affordable semiconductor chips well into single digit process nodes.”
The TWINSCAN NXE:3400B and YieldStar 375F are currently shipping to logic and memory customers worldwide. The HMI eP5 is expected to ship in the second half of this year. The TWINSCAN NXT:2000i has an ongoing early access program that includes key hardware innovations as field upgrades. The first TWINSCAN NXT:2000i that is completely built in our factory is expected to ship in 2018.