Back to Editors' Blog

New Process Modeling Mechanism

by Bryon Moyer

June 05, 2013 at 11:27 AM

Simulation is all about using the simplest possible modeling technique that gives enough accuracy to make the results useful. Simplicity typically speeds up simulation – and, in many cases, makes the problem tractable in the first place.

But at some point, the unnecessary details that the modeling abstractions hide become necessary. At that stage, if you’re lucky, you can tweak your modeling technique to allow for the now-important effects. But eventually you may to have to take a new approach.

This is what’s happened for certain very specific processes that Coventor’s SEMulator3D tool models. Their voxel approach still works for most processes, but can’t capture all the nuances of multi-etch and selective epitaxy processes. For example, in multi-etch, where multiple materials are being etched in one step, the vertical etch rates work just fine with voxels, but they can’t capture lateral bias. For selective epitaxy, crystal orientation can affect growth rates; again, this isn’t modeled well by voxels.

So they’ve added a “surface evolution” option – a completely different mathematical approach to modeling those processes. It handles multi-etch, improves the epitaxy modeling that they introduced last year, and also introduces redeposition (where etching results in deposition of the etched material elsewhere, particularly used for sidewalls) and sputtering.

They have also introduced virtual metrology capabilities that mirror the in-line process metrology that would normally be built into a physical fabrication line. This allows monitoring of critical parameters as the process is simulated just as would be done if the experiments being simulated were actually being done on physical wafers in a real fab.

You can find out more about the latest SEMulator3D version, which they say is the biggest release they’ve ever done, in their announcement.

Channels

EDA. MEMS and Smart Systems. Manufacturing. Semiconductor.

 
    submit to reddit  



Comments:

You must be logged in to leave a reply. Login »

Related Articles

Where is the Value? Where is the ROI?

IoT Business Model Ruminations

by Bryon Moyer

When you think about it, the much-vaunted launch of the Internet of Things (IoT) represents an enormous investment in research, development, and rollout. Much is made of all the cool things well be able to do once its all in place, but I see less discussion of what the return will be on all of that investment. After all, some of us may be focused on this because we think the technology is cool, but someone else has to pay us, and so theyre going to want to see something for their efforts in the long-run.

You might wonder, for example, why a simple, self-respecting thermostat maker would want to get all complicated by adding a bunch of functionality to the poor little wall-mounted bugger, bringing the phone and cloud into the party as well. If youre that thermostat guy and youre using classical marketing thinking, then one reason for doing this might be so that your thermostat will do more than your competitors, and so youll sell more than they will.

The return? The extra profits from the extra sales....

From Cradle to Cloud

Education Meets High Tech

by Amelia Dalton

FPGA-Prototyping Simplified

Cadence Rolls New Protium Platform

by Kevin Morris

System on Chip (SoC) design today is an incredibly complicated collaborative endeavor. By applying the label System to the chips we design, we enter a...

An Irregular Street Scene

Plasma-Therm Proposes Plasma Dicing

by Bryon Moyer

A silicon wafer will always be patterned with a perfect grid of rectangular dice. Its so obvious that you even have to think about...

Dont Pass Me By

Project Ara Dev Boards and the Internet of Moving Things

by Amelia Dalton

The pedal is to the metal, our motor is running, and Fish Fry is hitting the open road. At the wheel this week is mCube...


Login Required

In order to view this resource, you must log in to our site. Please sign in now.

If you don't already have an acount with us, registering is free and quick. Register now.

Sign In    Register